A new method in electron microscopy enables sub-20-picometer targeting of individual atoms without prior exposure, opening the door to atom-specific analysis and control. (Nanowerk Spotlight) ...
Hosted on MSN
Electron beam method enables precise nanoscale carving and building of copper structures
Creating complex structures at the tiniest scales has long been a challenge for engineers. But new research from Georgia Tech shows how electron beams, already widely used in imaging and fabrication, ...
For decades, optical inspection has been the primary method for process control in fabs. However, the move to multi-level ...
Some results have been hidden because they may be inaccessible to you
Show inaccessible results