A new method in electron microscopy enables sub-20-picometer targeting of individual atoms without prior exposure, opening the door to atom-specific analysis and control. (Nanowerk Spotlight) ...
Creating complex structures at the tiniest scales has long been a challenge for engineers. But new research from Georgia Tech shows how electron beams, already widely used in imaging and fabrication, ...
For decades, optical inspection has been the primary method for process control in fabs. However, the move to multi-level ...